surface analysis

Surface analysis tools

Surface analysis tools include AES (Auger Electron Spectroscopy); ESCA (Electron Spectroscopy for Chemical Analysis), also known as XPS (X-ray photoelectron spectroscopy); and SSIM (Static secondary ion mass spectrometry).

Surface analysis tools are most often used to characterize elemental composition and chemistry of the outer surface (top 4 to 5 nm) and employ electron, x-ray, and ion probes, often in combination with depth profiling techniques.

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