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Counter-scanning (CS) is a method for measuring surface topography with a scanning probe microscope enabling correction of raster distortions resulted from drift of the microscope probe relative to the surface being measured. Two surface scans, viz. direct scan and counter one, are obtained during CS. The counter scan starts in the point where the direct scan ends. This point is called the coincidence point (CP). With the counter scan, the probe movement along the raster line and the probe movement from one raster line to the other raster line are carried out along the directions that are opposite to the movements in the direct scan. The obtained pair of images is called the counter-scanned images (CSIs).


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