Process of growing a crystal of a particular orientation on top of another crystal. If both crystals are of the same material, the process is known as homoepitaxy; if the materials are different, it is known as heteroepitaxy. Common types of epitaxy include vapour phase, liquid phase, and solid phase, according to the source of the atoms being arranged on the substrate. Epitaxy is most frequently employed in the production of semiconductor wafers for use in the creation of integrated circuits.

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