The oil diffusion pump is operated with an oil with low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high vacuum range (down to 10-9 mbar), diffusion pumps today can produce pressures approaching 10-10 mbar when properly used with modern fluids and accessories. The features that make the diffusion pump attractive for high and ultra-high vacuum use are its high pumping speed for all gases and low cost per unit pumping speed when compared with other types of pump used in the same vacuum range. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump is typically used to maintain an outlet pressure around 0.1 mbar.
The high speed jet is generated by boiling the fluid and directing the vapor through a jet assembly. Note that the oil is gaseous when entering the nozzles. Within the nozzles, the flow changes from laminar, to supersonic and molecular. Often several jets are used in series to enhance the pumping action. The outside of the diffusion pump is cooled using either air flow or a water line. As the vapor jet impacts the outer cooled shell of the diffusion pump, the working fluid condenses, is recovered, and directed back to the boiler. The pumped gases continue flowing to the base of the pump at increased pressure, flowing out through the diffusion pump outlet, where they are compressed to ambient pressure by the secondary mechanical forepump and exhausted.
Unlike turbomolecular pumps and cryopumps, diffusion pumps have no moving parts and as a result are quite durable and reliable. They can function over pressures ranges of 10-10 to 10-2 mbar. They are driven only by convection and thus have a very low energy efficiency.
One major disadvantage of diffusion pumps is the tendency to backstream oil into the vacuum chamber. This oil can contaminate surfaces inside the chamber or upon contact with hot filaments or electrical discharges may result in carbonaceous or siliceous deposits. Due to backstreaming, oil diffusion pumps are not suitable for use with highly sensitive analytical equipment or other applications which require an extremely clean vacuum environment, but mercury diffusion pumps may be in the case of ultra high vacuum chambers used for mercury deposition. Often cold traps and baffles are used to minimize backstreaming, although this results in some loss of pumping ability.
WIPO ASSIGNS PATENT TO INJE UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION FOR "INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS EMPLOYING DIFFUSION PUMP" (SOUTH KOREAN INVENTOR)
Nov 11, 2010; GENEVA, Nov. 17 -- Publication No. WO/2010/128740 was published on Nov. 11. Title of the invention: "INDUCTIVELY COUPLED PLASMA...