Semiconductor manufacturing equipment

IEEE Transactions on Semiconductor Manufacturing

The IEEE Transactions on Semiconductor Manufacturing (SM) is a quarterly journal published by the IEEE Computer Society. It contains peer-reviewed articles and other contribitions in the area of semiconductor device fabrication.

The journal covers areas of process and equipment control, simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, manufacturability improvement.

It is a joint publication of

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