Electroetching is an etching process that involves the use of chemicals, along with the employment of direct electric current and is done by applying electrochemical etching solution to a material layer, preferably a metal layer, on a workpiece, in the presence of a current.

This electrochemical etching solution supplies to the material on the substrate surface the species to form an intermediate compound on the surface that can be more easily mechanically removed as intermediate compound fragments than the material.

By removing the intermediate compound fragments, the process allows more efficient use of the supplied current to form another layer of intermediate compound that can also be mechanically removed, rather than using the current to result in another compound on the surface of the material that eventually dissolves into the solution.

External links

Electroetching of Platinum in the Titanium-Platinum-Gold Metallization on Silicon Integrated Circuits

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